Onsite Power Quality Audit

EPRI has conducted comprehensive power quality audits at dozens of semiconductor facilities in worldwide.  Utilizing our knowledge base of tool susceptibilities and SEMI F47 solutions, EPRI can help the semiconductor manufacturer to improve tool voltage sag immunity and minimize downtime.

• SemiF47 Compliance Testing (PQ Star)
• Consulting
• Training
• Onsite Testing
• Lab Bench Testing
• Onsite Power Quality Audit
• Sag Generator Product Line

EPRI follows a proven methodology when evaluating semiconductor manufacturing sites.  The typical tasks include:

• Evaluation of the sensitivity of the existing tools based on a review of numerous tool tests that have been conducted by EPRI in the past.
• Providing specific recommendation for tool hardening and the associated cost for implementing these options at the tool level.
• Providing recommendations for tool and/or component testing if required.
• Identifying the proper location for the tool power conditioning options taking into account the difficulty in installing power conditioning options inside the clean room or sub-fab.
• Performing a cost-benefit analysis for these different options taking into account the historical voltage sag monitoring data product loss data(if available).

EPRI PQ Audit Approach

When solving voltage sag immunity issues for a semiconductor processing facility, the immunity of all interlocking subsystems must be considered.  For example, if the process vacuum pump package shuts down as a result of a voltage sag event, the tool operations are likely to halt as well.  Furthermore,  a shutdown of the Process Cooling Water (PCW) pumps or exhaust system can lead to immediate shutdown of tooling operations.   For the semiconductor processing tool to continue to operate during typical voltage sag events, the tool itself must be robust to power quality variations as well as the support systems.

Power Quality Interfaces

Typical Interconnection of Facility Infrastructure Equipment with Process and Support Equipment