Training Course Outline

1.0 Introduction

• Terminology - What is a voltage sag? Outage?
• Background of Power Quality work in Semiconductor Industry
• EPRI System Compatibility Task 24
• SEMI Power Quality and Equipment Ride-Through Task Force Activities

2.0  Power Quality Basics and the Electrical Environment

• EPRI DPQ data
• SEMI Task Force Characterization
• CBEMA Curve

3.0  Review of the SEMI F47 Standard 

• Why a standard for this industry?
• General Overview of document
• Review of Each Section of Document
• Review of Voltage Tolerance Curve

4.0 Semiconductor Tool Test Protocol

• Review of  SEMI F42
• General Overview
• Review of Document
• SEMI F42 Tool Test Equipment Demonstration
• Voltage Sag Testing Demonstration
• EMO Circuit
• Controller
• Contactors
• DC Power Supply

5.0 Semiconductor Tool Test Results (Generic)

• Summary of Tools Tested by Wafer Size
• Breakout of Tools Tested by Type
• Summary of weak link components
• Tool Test Result Case Studies
  • Tool A
  • Tool B
  • Tool C

6.0 Recommendations for Improving PQ Performance of Semiconductor Tools

• Applications of Low Cost Selective Power Conditioners
  • Overview of available devices
  • The Constant Voltage Transformer
  • The UPS
  • The Dip Proofing Inverter
  • The Dynamic Sag Corrector
  • Coil Hold in devices
  • Voltage Sag Demonstration of Selective Power
• Conditioners using portable PLC based Control System
• Embedded Solutions        
  • Equipment Specifications
  • Matching Equipment Voltages
  • Effect of Low Voltage on Power Supply Storage
    • Effect of Low Voltage on EMO Circuits
  • Use of Robust Relays and Contactors
  • Increased use of DC for system loads (controller, EMO, etc.)
  • Control Power Transformers
    • Wiring Options
    • Linearity
  • Power Supply Loading
  • ASD Configuration
  • Use of Phase Monitoring Relays
  • Controller Programming Methodology
  • Implementation of High Voltage DC Power Supplies

7.0 Recommendations for Improving Overall Plant PQ Performance (PQS-102 Only)

Course Deliverables

• Up to 20 Course CDs that will include:
  • Presentation Material
  • EPRI  Power Quality Test Briefs, Application Notes, and Commentaries and Semiconductor Power Quality Articles
  • Related vendor spec sheets
  • Website Links to Power Quality Equipment Providers
• EPRI will provide Audio/Visual Equipment